Sensitivity Jump of Micro Accelerometer Induced by Micro-fabrication Defects of Micro Folded Beams
نویسندگان
چکیده
منابع مشابه
Fabrication of Polymeric Micro needle Array by Micromachining & Micro molding
Microneedles are expected to have greater demand in biomedical applications like sensing, electroporation & drug delivery in the future and there is need for development of fabrication process which is simple, economical and productive. Present work discusses about fabrication of PDMS (polydimethylsiloxane) micro needle array electrode for bio-potential signal measurement like EEG by micromachi...
متن کاملMicro-layered-photolithography for Micro- Fabrication and Micro-molding
A novel process based on the principle of layered photolithography has been proposed and tested for making three-dimensional micro-structures. An experimental setup was designed and built for doing experiments on this micro-fabrication process. An ultraviolet (UV) excimer laser at the wavelength of 248 nm was used as the light source and a single piece of photo-mask carrying a series of two dim...
متن کاملHigh-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer
Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe ...
متن کاملNozzle Fabrication for Micro Propulsion of a Micro Satellite
⎯ To enable formation flying of micro satellites, small sized propulsion systems are required. Our research focuses on the miniaturization of a feeding and thruster system by means of micro system technology (MST). Three fabrication methods have been investigated to make a conical converging-diverging nozzle. These methods are reactive ion etching, femtosecond laser machining (FLM) and a combin...
متن کاملGlass Polarization Induced Drift of a Closed-Loop Micro-Accelerometer
The glass polarization effects were introduced in this paper to study the main cause of turn-on drift phenomenon of closed-loop micro-accelerometers. The glass substrate underneath the sensitive silicon structure underwent a polarizing process when the DC bias voltage was applied. The slow polarizing process induced an additional electrostatic field to continually drag the movable mass block fr...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Measurement Science Review
سال: 2016
ISSN: 1335-8871
DOI: 10.1515/msr-2016-0028